Ultra-High Vacuum Gauge "3B-Gauge"
High-precision ion gauge head with an X-ray limit of 10^-12 Pa! Ultra-high vacuum gauge.
The "3B-Gauge" is a new type of measuring device that comprehensively improves the three measurement limits of soft X-rays, electron impact desorption (ESD), and gas release present in thermal cathode ionization vacuum gauges, enabling pressure measurements down to the 10^-12 Pa range. The electrodes are embedded within a conflated flange (ICF70) made of ultra-low gas release vacuum structural material, a 0.2% BeCu alloy, to achieve low gas release. 【Features】 ■ Comprehensive improvement of the three measurement limits ■ Capable of measuring pressures down to the 10^-12 Pa range ■ Achieves low gas release ■ Flange material: 0.2% BeCu alloy (appearance NiP plated) ■ Current introduction terminals: SUS304, Kovar vacuum terminals *For more details, please refer to the PDF document or feel free to contact us.
- 企業:東京電子
- 価格:Other